{"title":"IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes","authors":"N. Almeida, J. Pires, D. Sora","doi":"10.1109/ASMC.2012.6212904","DOIUrl":null,"url":null,"abstract":"IMPROVE is a European project aiming to research and develop methods and tools to increase the efficiency of semiconductor production processes. Within project activities three simulation applications with disparate technical characteristics, using different technologies, were developed. Critical Manufacturing accepted the challenge of developing a tool capable of connecting these simulation modules, execute them as a continuous process and save the results for further analysis.","PeriodicalId":283238,"journal":{"name":"2012 SEMI Advanced Semiconductor Manufacturing Conference","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-05-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 SEMI Advanced Semiconductor Manufacturing Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.2012.6212904","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
IMPROVE is a European project aiming to research and develop methods and tools to increase the efficiency of semiconductor production processes. Within project activities three simulation applications with disparate technical characteristics, using different technologies, were developed. Critical Manufacturing accepted the challenge of developing a tool capable of connecting these simulation modules, execute them as a continuous process and save the results for further analysis.
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