{"title":"MEMS filters based on traveling flexural waves","authors":"S. Houri, J. Raskin, L. Francis","doi":"10.1109/FREQ.2010.5556353","DOIUrl":null,"url":null,"abstract":"This paper introduces MEMS filters based on the use of traveling flexural waves. The underlying concept of these devices draws on an analogy with SAW devices, while replacing the surface elastic wave with a flexural wave on a suspended beam. This is in contrast with traditional flexural MEMS devices whereby all signal processing is done via a resonating element corresponding to a standing flexural wave. As far as the authors are aware this is the first study regarding traveling flexural wave devices and their frequency domain behavior.","PeriodicalId":344989,"journal":{"name":"2010 IEEE International Frequency Control Symposium","volume":"65 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 IEEE International Frequency Control Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2010.5556353","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper introduces MEMS filters based on the use of traveling flexural waves. The underlying concept of these devices draws on an analogy with SAW devices, while replacing the surface elastic wave with a flexural wave on a suspended beam. This is in contrast with traditional flexural MEMS devices whereby all signal processing is done via a resonating element corresponding to a standing flexural wave. As far as the authors are aware this is the first study regarding traveling flexural wave devices and their frequency domain behavior.
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