{"title":"In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization","authors":"D. Moszko, O. Faehnle, C. Vogt, D. Kim","doi":"10.1117/12.2596034","DOIUrl":null,"url":null,"abstract":"In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"87 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Optics Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2596034","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.
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