Analysis on electrical and optical properties of nitrogen incorporated amorphous carbon prepared by aerosol-assisted CVD method

A. N. Fadzilah, K. Dayana, L. N. Ismail, M. Rusop
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Abstract

We have successfully deposit the a-C and nitrogen doped a-C (a-C:N) using the custom-made Aerosol-assisted CVD (AACVD). Natural precursor, camphor oil (C10H16O) was selected as the carbon source. The electrical and optical properties were characterized by BUKOH KEIKI CEP2000 solar simulator system and Perkin Elmer LAMBDA 750 UV-vis-NIR spectroscope respectively. Five samples were prepared for the a-C and a-C: N respectively, with the deposition temperatures ranging from 400°C to 600°C. An ohmic contact was acquired between the carbon/metal configurations from the current-voltage solar simulator system. Higher conductivity at a-C: N, ~x10-2 Scm-1 is due to the decrease in defects since the spin density gap decrease with the nitrogen addition. Pure a-C exhibit absorption coefficient, a of 10 cm-1, whereas for a-C:N, a is of 10 cm-1. The high σ value is at a-C:N is due to the presence of more graphitic component (sp2 carbon bonding) in the carbon films.
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气溶胶辅助CVD法制备氮掺杂非晶碳的电学和光学性质分析
我们使用定制的气溶胶辅助CVD (AACVD)成功沉积了a-C和氮掺杂的a-C (a-C:N)。选择天然前驱体樟脑油(C10H16O)作为碳源。利用BUKOH KEIKI CEP2000太阳模拟器系统和Perkin Elmer LAMBDA 750紫外-可见光-近红外光谱仪分别对其电学和光学性质进行了表征。分别制备了a-C和a-C: N的5个样品,沉积温度为400℃~ 600℃。从电流-电压太阳模拟器系统中获得了碳/金属结构之间的欧姆接触。在a-C: N, ~x10-2 cm-1处电导率较高是由于自旋密度间隙随着氮的加入而减小,缺陷减少。纯a- c的吸收系数a为10 cm-1,而a- c:N的吸收系数a为10 cm-1。在a-C:N处的高σ值是由于碳膜中存在较多的石墨成分(sp2碳键)。
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