{"title":"Control System of an Automated Nanohandling Robot Cell","authors":"C. Stolle, S. Fatikow","doi":"10.1109/ISIC.2007.4450964","DOIUrl":null,"url":null,"abstract":"Current research work on the development of a nanohandling cell in a scanning electron microscope (SEM) is presented. An experimental setup is shown, in which two microrobots operate in the vacuum chamber of an SEM. In order to enable automatic nanohandling, a modular control system architecture is proposed. Different microrobots can be integrated in a flexible manner using a common control interface. The system easily scales up for more complex robot and sensor setups. Parallel execution of open and closed-loop control tasks can be performed. The functionality of the robot cell is exemplified by handling and mechanical characterization of carbon nanotubes (CNT).","PeriodicalId":184867,"journal":{"name":"2007 IEEE 22nd International Symposium on Intelligent Control","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 22nd International Symposium on Intelligent Control","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISIC.2007.4450964","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
Current research work on the development of a nanohandling cell in a scanning electron microscope (SEM) is presented. An experimental setup is shown, in which two microrobots operate in the vacuum chamber of an SEM. In order to enable automatic nanohandling, a modular control system architecture is proposed. Different microrobots can be integrated in a flexible manner using a common control interface. The system easily scales up for more complex robot and sensor setups. Parallel execution of open and closed-loop control tasks can be performed. The functionality of the robot cell is exemplified by handling and mechanical characterization of carbon nanotubes (CNT).
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