Flexible Mechanical Sensor Based on Epitaxial BaTiO3 Films with Biaxial Anisotropy

Abstract

Under the background of silicon-based materials dominating the electronic device market, flexible inorganic epitaxial films provide more creativity for the new generation of flexible electronic devices. Here, utilizing polymer-assisted deposition technique and transfer-print method, epitaxial BaTiO3 (BTO) film has been fabricated on the flexible substrate. As the film can be completely transferred without residual on the substrate, the flexible mechanical sensor has been fabricated utilizing the coplanar dielectric anisotropy of the BTO film, which exhibits good output stability. Moreover, according to the piezoelectric properties of BTO films, one concept of the flexible and stretchable three-dimensional vibration detection sensor is proposed. These results provide a new route to realize low-cost flexible epitaxial ferroelectric film.