Method for Nano-scale Displacement Measurement Based on Fiber Bragg Grating

Abstract

The continuous development of nanoscience and nanotechnology engages more and more attention to micro-scale or nano-scale measurement technology. This paper studied a high-sensitivity displacement measurement method based on fiber Bragg grating (FBG), analyzed its measurement principle and system composition, and simulated signals of the high-resolution wavelength demodulation system of FBG. The sensitivity of the nano-scale measurement machine grows significantly owing to the design of an improved high-resolution wavelength demodulating method. Finally, the experimental error sources were analyzed. The final performance experiments and results of the measurement system indicate the machine sensitivity reaches 6.22 mV/nm, and resolution is about 3.3 nm.