Liquid Phase Deposition of GeO2 Glass Hollow Waveguide for Delivery of CO2 Laser Radiation

C. Jing, J. Chu, P. H. Hopchev, Wei Sun, Yi Li
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Abstract

CO2 laser (wavelength 10.6 μm) has important applications in laser surgery, material processing, infrared sensors and imaging. CO2 laser optical waveguides are gaining a central position in these applications. Glass-drawing technique and sol-gel methods have been used to prepare GeO2 and germania-based glass hollow waveguides. In this work, a GeO2 glass hollow waveguide sample was fabricated by using a liquid phase deposition (LPD) approach. The morphology, structure and optical transmission properties of the sample were studied. The results indicate that a GeO2 glass reflective layer could be formed on the inner wall of a silica glass capillary tube via the LPD process. The GeO2 glass layer and the substrate silica glass tube constitute an attenuated total reflectance (ATR) hollow waveguide structure. An nr<;1 band centering at around 10.6 μm is observed by loss spectrum analysis of the sample. The sample shows a mean loss of 1.13 dB/m for delivery of a ~35 W CO2 laser beam (TEM00).
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用于CO2激光传输的GeO2玻璃中空波导的液相沉积
CO2激光器(波长10.6 μm)在激光手术、材料加工、红外传感器和成像等领域有着重要的应用。CO2激光光波导在这些应用中占据了中心地位。玻璃拉伸技术和溶胶-凝胶法制备了GeO2和锗基玻璃空心波导。本文采用液相沉积(LPD)法制备了GeO2玻璃空心波导样品。研究了样品的形貌、结构和光传输性能。结果表明,通过LPD工艺可以在石英玻璃毛细管内壁形成GeO2玻璃反射层。GeO2玻璃层与衬底硅玻璃管构成衰减全反射(ATR)中空波导结构。通过损耗谱分析,发现样品有一个以10.6 μm为中心的nr< 1波段。样品显示,当输出~ 35w CO2激光束(TEM00)时,平均损耗为1.13 dB/m。
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