T. Käseberg, J. Grundmann, T. Siefke, S. Kroker, B. Bodermann
{"title":"Optical nanoform characterization by imaging Mueller matrix ellipsometry","authors":"T. Käseberg, J. Grundmann, T. Siefke, S. Kroker, B. Bodermann","doi":"10.1117/12.2599853","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":448260,"journal":{"name":"Optical Instrument Science, Technology, and Applications II","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Instrument Science, Technology, and Applications II","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2599853","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}