A Multi-Protocol Module To Provide An External Trigger For Dynamic Lock-In Thermography

R. Bienek
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Abstract

Lock-in thermography (LIT) is a firmly established and powerful technique for IC defect localization. The standard approach is to detect and analyze the device temperature fluctuation between two bias conditions using an infrared thermal imaging camera and check for any anomalous heat response. For the most straightforward setup, these bias conditions would be achieved by the modulation of a supply voltage provided by the LIT system. This allows for synchronization to the internal camera frame rate. In addition to this method, the ability to provide an external trigger may be an option, as it is for the ELITE system by Thermo Fisher Scientific. This expands the LIT arena to failures that may only be observable by, for example, setting different register contents at a constant supply voltage. Though IC testers can be used to provide the stimulus and a trigger signal for these situations, often a simpler, more compact solution would be beneficial for the failure analyst. This paper presents such an alternative: the application of a low-cost, USB-based module which can emulate various communication protocols (for example, I2C, SPI) while providing a synchronized timing pulse to externally trigger the ELITE, thus facilitating dynamic LIT investigations. The efficacy of this solution is demonstrated by a case study in which dynamic LIT produced a single hot spot at the defect site that was undetected by the voltage modulation approach.
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为动态锁定热成像提供外部触发的多协议模块
锁定热成像技术(LIT)是一种成熟而强大的集成电路缺陷定位技术。标准方法是使用红外热像仪检测和分析器件在两种偏置条件下的温度波动,并检查是否有异常热响应。对于最简单的设置,这些偏置条件将通过调制由LIT系统提供的电源电压来实现。这允许与内部相机帧速率同步。除了这种方法,提供外部触发器的能力也是一种选择,就像赛默飞世尔科技公司的ELITE系统一样。这扩大了LIT领域的故障范围,例如,只有在恒定电源电压下设置不同的寄存器内容时才能观察到这些故障。虽然可以使用IC测试仪为这些情况提供刺激和触发信号,但通常更简单,更紧凑的解决方案将有利于故障分析人员。本文提出了这样一种替代方案:应用低成本,基于usb的模块,可以模拟各种通信协议(例如,I2C, SPI),同时提供同步定时脉冲以外部触发ELITE,从而促进动态LIT调查。该解决方案的有效性通过一个案例研究得到了证明,其中动态LIT在电压调制方法无法检测到的缺陷部位产生了单个热点。
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