Sohyeon Jung, Moogoong Choo, Jae-Yeong Lee, In-sung Ahn, Kangseop Lee, W. Hong
{"title":"Free-Space Permittivity Measurement for Inhomogeneous PSV-Coated Si-wafer at Frequencies from 75 GHz to 325 GHz","authors":"Sohyeon Jung, Moogoong Choo, Jae-Yeong Lee, In-sung Ahn, Kangseop Lee, W. Hong","doi":"10.1109/IEEE-IWS.2019.8804020","DOIUrl":null,"url":null,"abstract":"A method to extract dielectric property of inhomogeneous PSV (Passivation)-coated Si-wafer is presented at broadband frequencies from 75 GHz to 325 GHz. Free-space measurement using continuous wave (CW) system is carried out. Numerical iterative algorithm is employed to extract permittivity from complex scattering parameters. Due to scarcity of related previous studies beyond 100 GHz, the discussions on parameters that may affect the results are also described in detail. The calculated permittivity based on the proposed method highly correlates with the analytical values.","PeriodicalId":306297,"journal":{"name":"2019 IEEE MTT-S International Wireless Symposium (IWS)","volume":"0430 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE MTT-S International Wireless Symposium (IWS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEEE-IWS.2019.8804020","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A method to extract dielectric property of inhomogeneous PSV (Passivation)-coated Si-wafer is presented at broadband frequencies from 75 GHz to 325 GHz. Free-space measurement using continuous wave (CW) system is carried out. Numerical iterative algorithm is employed to extract permittivity from complex scattering parameters. Due to scarcity of related previous studies beyond 100 GHz, the discussions on parameters that may affect the results are also described in detail. The calculated permittivity based on the proposed method highly correlates with the analytical values.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
