Preparation and nanostructured properties of amorphous carbon prepared by Aerosol-Assisted CVD (AACVD)

Abstract

The feasibility of Aerosol-Assisted CVD (AACVD) has been investigated for the growth of Amorphous Carbon (a-C) films using natural source of camphor oil as the precursor material. The deposition parameter was first established by setting the precursor material at room temperature and at camphor oil vaporization temperature (180°C), whereas the deposition temperature was set constant at 500°C. Films were characterized by using the Solar Simulator system, UV/VIS/NIR spectrometer and FESEM for electrical, optical and structural properties of the thin films. From the characterization of the electrical properties, I–V graph was modeled for both conditions, and linear graph (ohmic) were performed and the analyze reveal that conductivity shows an increment when the precursor was heated at the vaporization temperature, with the value of 0.1030×10⁻⁴ Scm⁻¹ to 5.8390×10⁻⁴ Scm⁻¹ (in dark) and from 0.1240×10⁻⁴ Scm⁻¹ to 8.1190×10⁻⁴ Scm⁻¹ (under illumination). Contradicts from the electrical conductivity, the optical properties characterization results in band gap 0.7eV and 0.3eV from the Tauc's plot and structural properties proves the nanostructured particle of the a-C.