Temperature sensor readout circuit for microheaters

S. Hashim, U. Chandaran, Z. A. Halim
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Abstract

This paper analyzes power consumption of microelectromechanical-system (MEMS) heater design in combination with Negative Temperature Coefficient (NTC) thermistor in Wheatstone bridge circuit. The simulation of heater design is carried out based on the minimal power usage depends on heater shape, resistance and current supply. Temperature measurement of the heater is recorded through resistive sensor, which is NTC thermistor. Resistance value of thermistor is selected based on the heater design parameters. For temperature readout circuit, NTC thermistor and heater is combined together in Wheatstone bridge. Results show that by using Wheatstone bridge principle, it offers the simplest and low cost application especially for microheater gas sensor array design.
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用于微加热器的温度传感器读出电路
本文分析了惠斯通电桥电路中采用负温度系数(NTC)热敏电阻的微机电系统(MEMS)加热器设计的功耗。基于加热器形状、电阻和电流的最小功耗,对加热器设计进行了仿真。加热器的温度测量是通过电阻传感器记录的,该传感器是NTC热敏电阻。根据加热器的设计参数选择热敏电阻的电阻值。对于温度读出电路,NTC热敏电阻和加热器在惠斯通电桥中组合在一起。结果表明,利用惠斯通电桥原理设计微加热器气体传感器阵列具有简单、低成本的优点。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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