MEMS and lab on chip: Interfacing macro to nano world

Abstract

Rapid development of microelectronic technology in past four decade is closely related to remarkable progress of technological tools. These new tools may be used for fabrication of MEMS (Micro-ElectroMechanical-System) which integrate microelectronic and micromechanical structures in one system enabling interdisciplinary application. Although MEMS have grown from microelectronics, they are different in technological approach. Using MEMS approach, called microfluidic, small volume of fluid down to less than pico liters can be handled. The scaling of single or multiple lab process down to chip-format known as Lab-on-a-Chip (LOC). Micro and nanoparticles handling can be done using LOC which combines several laboratory functions on a single chip that is only a few millimeters to a few square centimeters in size. MEMS is used to perform chemical analysis by combining laboratory processes on a single chip. The basis for most LOC fabrication processes is photolithography directly derived from microelectronic fabrication. For specific optical characteristics, bio or chemical compatibility, lower production costs and faster prototyping, new processes have been developed such as glass, ceramics and metal etching, deposition and bonding, PDMS process or soft lithography, as well as fast replication methods via electroplating, injection molding and embossing. This talk also discusses several research activities related to the development of LOC conducted at IMEN, UKM Malaysia to handle biological process for medical applications.