SLX series of deep-cold container temperature testing and the temperature uniformity study

Zhiqi Liu, X. Yan, Yu Tian
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Abstract

Pt100 of platinum resistance sensor is used to measure the internal temperature of the SLX series deep-cool container, and the conditioning circuit of temperature measurement is given. The temperature of the same temperature point is repeatedly measured to gain the 9 points datum, and the uniformity value of temperature is obtained as compare with the 9 points data under different temperatures point of the device. The temperature experiment shows that the platinum resistance temperature sensor is precise and stabilized to measure temperature under temperature uniformity test, and the proposed method can solve the instability of the previous process of deep cryogenic treatment.
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SLX系列深冷容器温度测试及温度均匀性研究
采用铂电阻传感器Pt100测量SLX系列深冷容器内部温度,给出了测温调理电路。重复测量同一温度点的温度,得到9点基准,并与设备不同温度点下的9点数据进行对比,得到温度的均匀性值。温度实验表明,铂电阻温度传感器在温度均匀性测试下测量温度精度高、稳定性好,解决了以往深冷处理工艺的不稳定性问题。
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