Sol-gel strontium titanate nickelate thin films for flexible nonvolatile memory applications

Ke-Jing Lee, Yu‐Chi Chang, Cheng-Jung Lee, Li-Wen Wang, Yeong-Her Wang, D. Chou
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引用次数: 1

Abstract

Bipolar resistive switching random access memory (RRAM) devices on a plastic substrate are investigated. Strontium titanate nickelate (STN) thin film prepared by sol-gel method served as insulator on an Al/STN/ITO/PET structure. The STN-based flexible RRAM shows a high ON/OFF resistance ratio (≥ 105) and a retention ability of over 105 s. The characteristics of Ni in the STO thin films demonstrate that spin casting without doping other elements or any complex processes can be used to fabricate thin films with higher density of oxygen vacancies, less particles, and smoother surface. In addition, the fabricated devices on a flexible plastic substrate exhibit excellent durability upon repeated bending tests, demonstrating the potential for flexible and low-cost memory applications.
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柔性非易失性存储器用钛酸锶镍酸盐溶胶-凝胶薄膜
研究了塑料衬底上双极电阻开关随机存取存储器(RRAM)器件。采用溶胶-凝胶法制备钛酸镍锶(STN)薄膜,作为Al/STN/ITO/PET结构的绝缘体。基于stn的柔性RRAM具有高的ON/OFF电阻比(≥105)和超过105 s的保持能力。镍在STO薄膜中的特性表明,不掺杂其他元素或任何复杂工艺的自旋铸造可以制备出具有更高氧空位密度、更少颗粒和更光滑表面的薄膜。此外,在柔性塑料基板上制造的器件在反复弯曲测试中表现出优异的耐久性,证明了柔性和低成本存储应用的潜力。
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