Sheet resistance and optical properties of ITO thin films deposited by magnetron sputtering with different O2/Ar flow ratio

M. Mazur, J. Domaradzki, D. Kaczmarek, S. Moh, F. Placido
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引用次数: 2

Abstract

Transparent conducting indium-tin oxide (ITO) thin films play a very important role in the field of optoelectronic devices such as photovoltaic cells and flat panel display devices. ITO films display low electrical resistance and high transmittance in the visible range of the optical spectrum [1].
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不同O2/Ar流量比下磁控溅射ITO薄膜的片电阻和光学性能
透明导电氧化铟锡(ITO)薄膜在光伏电池、平板显示器件等光电器件领域发挥着非常重要的作用。ITO薄膜在可见光范围内电阻低,透光率高[1]。
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