M. Mazur, J. Domaradzki, D. Kaczmarek, S. Moh, F. Placido
{"title":"Sheet resistance and optical properties of ITO thin films deposited by magnetron sputtering with different O2/Ar flow ratio","authors":"M. Mazur, J. Domaradzki, D. Kaczmarek, S. Moh, F. Placido","doi":"10.1109/STYSW.2010.5714168","DOIUrl":null,"url":null,"abstract":"Transparent conducting indium-tin oxide (ITO) thin films play a very important role in the field of optoelectronic devices such as photovoltaic cells and flat panel display devices. ITO films display low electrical resistance and high transmittance in the visible range of the optical spectrum [1].","PeriodicalId":160376,"journal":{"name":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Students and Young Scientists Workshop \"Photonics and Microsystems\"","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/STYSW.2010.5714168","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Transparent conducting indium-tin oxide (ITO) thin films play a very important role in the field of optoelectronic devices such as photovoltaic cells and flat panel display devices. ITO films display low electrical resistance and high transmittance in the visible range of the optical spectrum [1].