{"title":"Smart Integrated Metrology Sampling","authors":"H. Tsuchiyama, David Wizelman","doi":"10.1109/ISSM51728.2020.9377523","DOIUrl":null,"url":null,"abstract":"We have developed Metrology Sampling Optimizer integrated with Factory Scheduler to realize the visualization and control of Time to Defect Detection which is required by Zero defect activity for Automotive Quality. In this paper, the system architecture and deployment result is reviewed. Also, the system integration with AI FDC is under development so that the proactive metrological activity will reduce the overall risk on both equipment and product.","PeriodicalId":270309,"journal":{"name":"2020 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM51728.2020.9377523","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We have developed Metrology Sampling Optimizer integrated with Factory Scheduler to realize the visualization and control of Time to Defect Detection which is required by Zero defect activity for Automotive Quality. In this paper, the system architecture and deployment result is reviewed. Also, the system integration with AI FDC is under development so that the proactive metrological activity will reduce the overall risk on both equipment and product.
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