Design of Thin Membrane with Metal Layer Using FEM

Abstract

In this paper, mechanical sensitivity and deflection of center is compared with thin planar membrane, thin corrugated membrane and thin corrugated membrane with metal layer. All models have been developed by realizing the initial stress. Finite element model simulation results show that mechanical sensitivity of corrugated membrane with metal layer is less than a sensitivity of corrugated membrane. Considered sensitive element with metal layer has been designed and fabricated using silicon micro-machining technologies. Small sensitivity of corrugated membrane with metal layer is explained by residual stresses in metal layer after cooling construction.