Parasitic charge movement in floating-gate array programming

J. Gray, P. Hasler
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引用次数: 2

Abstract

Floating-gate charge storage is a key analog VLSI system technique. As the number of floating-gate elements in such VLSI systems increase, the relative area of the analog memory cell and its supporting circuitry become more critical. The compact floating-gate selection and isolation circuitry used in large-scale analog arrays is often based on a flawed assumption: that subthreshold conduction is the dominant source of parasitic charge movement associated with array isolation. The parasitic charge movement is primarily a combination of subthreshold conduction, PN-junction reverse bias current enhanced by gate-overlap, and Fowler-Nordheim tunneling. As a result, array isolation designed specifically to minimize subthreshold conduction can actually enhance the overall parasitic charge movement, leading to programming accuracy degradation. A procedure and experimental data demonstrating parasitic charge movement is shown for a device in an array fabricated on a 0.35 um process. Software and hardware hardware techniques for addressing and eliminating parasitic charge movement are discussed.
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浮动门阵列编程中的寄生电荷运动
浮栅电荷存储是模拟VLSI系统的关键技术。随着此类VLSI系统中浮门元件数量的增加,模拟存储单元及其支持电路的相对面积变得更加关键。大规模模拟阵列中使用的紧凑浮门选择和隔离电路通常基于一个有缺陷的假设:阈下传导是与阵列隔离相关的寄生电荷移动的主要来源。寄生电荷的运动主要是阈下传导、栅极重叠增强的pn结反向偏置电流和Fowler-Nordheim隧穿的组合。因此,专为最小化阈下传导而设计的阵列隔离实际上会增强总体寄生电荷移动,从而导致编程精度下降。给出了在0.35 μ m工艺上制作的阵列器件的寄生电荷移动的过程和实验数据。讨论了寻址和消除寄生电荷运动的软件和硬件技术。
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