I. Soldatenkov, V. Atuchin, A. Kirpichnikov, E. V. Mikhailov, D. Sheglov
{"title":"Kinoform optical elements in fused silica for high-power laser optics","authors":"I. Soldatenkov, V. Atuchin, A. Kirpichnikov, E. V. Mikhailov, D. Sheglov","doi":"10.1109/LFNM.2003.1246134","DOIUrl":null,"url":null,"abstract":"Diffractive phase optical elements or kinoforms are receiving marked attention in the recent years because of unconventional light wave transformations that can be realized with its using. Kinoform element function is specified by prescribed surface relief profile with the depth typically defined in the parts of micrometer scale. Usage of improved manufacturing techniques, such as photolithography and ion-beam etching, greatly upgrade the microrelief accuracy. This study considers the method of fabrication of multilevel kinoform microlens arrays in silica substrates feasible for processing of high-power laser beams and the observation of its geometry and optical characteristics.","PeriodicalId":368970,"journal":{"name":"5th International Workshop on Laser and Fiber-Optical Networks Modeling, 2003. Proceedings of LFNM 2003.","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-11-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"5th International Workshop on Laser and Fiber-Optical Networks Modeling, 2003. Proceedings of LFNM 2003.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LFNM.2003.1246134","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Diffractive phase optical elements or kinoforms are receiving marked attention in the recent years because of unconventional light wave transformations that can be realized with its using. Kinoform element function is specified by prescribed surface relief profile with the depth typically defined in the parts of micrometer scale. Usage of improved manufacturing techniques, such as photolithography and ion-beam etching, greatly upgrade the microrelief accuracy. This study considers the method of fabrication of multilevel kinoform microlens arrays in silica substrates feasible for processing of high-power laser beams and the observation of its geometry and optical characteristics.
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