A. Lim, T. Liow, N. Duan, Kok-Kiong Chen, R. P. Tern, G. Lo
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Abstract
We investigated the impact of contact engineering for Germanium photodetectors performance optimization. Split contacts increased the PD responsivity by ~2 times when compared to rectangle or island block contacts. In addition, dark current and bandwidth was shown to be highly dependent on n++ doping region whereby there is a trade-off for both parameters. From this work, a route to high responsivity and high speed detector can be achieved.
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