Fabrication of periodically poled domains transducers on LiNbO3

E. Courjon, N. Bodin, G. Lengaigne, L. Gauthier-Manuel, W. Daniau, S. Ballandras, P. Paruch, J. Triscone, J. Hauden
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引用次数: 9

Abstract

The development of piezoelectric transducers based on periodically poled ferroelectrics domains is investigated. Optical quality Z-cut LiNbO3 wafers have been used for the fabrication of test devices operating in the range 7-70 MHz. The fabrication process is detailed and characterization results are reported. A very good agreement between theoretical predictions achieved by periodic finite element analysis and experiments is observed, allowing for a precise identification of the excited modes
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在LiNbO3上制备周期性极化畴换能器
研究了基于周期性极化铁电畴的压电换能器的发展。光学质量的z型切割LiNbO3晶圆已用于制造在7-70 MHz范围内工作的测试设备。详细介绍了制备工艺,并报道了表征结果。通过周期性有限元分析得到的理论预测与实验结果非常吻合,从而可以精确地识别激发态
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