Micrometric displacement measurement using CMOS 0.35µm technology Quad-Cell

Abstract

Precise displacement estimation has high demands on the measurement system, but permits a wide range of applications. This paper presents a new methodology for precise micrometric displacement measurement utilizing a Quad-Cell (QC), Position Sensitive Detector (PSD) realized in a 0.35μm CMOS technology. Experimental results indicate high precision in the range of several micrometers for displacements of up to 2,400μm. Further, extracted curves permit the choice of the best trade-off between precision and maximum measureable displacement.