Study of the backward flow in Roots-type vacuum pump with elliptical rotor profile in the gas flow molecular regime

A. Isaev, A. Raykov, A. Burmistrov, S. Salikeev
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Abstract

A Roots-type two-rotor vacuum pump with the rotors’ elliptical profile was designed, developed and manufactured. Its channels conductivity was measured experimentally at various angles of the rotors’ rotation and pressures. Experimental conductivity of the channels was determined in the flow molecular regime. Using the angle factor method implemented in the COMSOL Multiphysics package calculated values of the channel conductivity were obtained for a two-rotor vacuum pump. Deviations in calculated data from the experimental data were not exceeding 10%. Verification and validation of analytical expressions for conductivity of the non-contact pump slot channels demonstrated possibility of their application in mathematical models of the working process of the two-rotor vacuum pumps.
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椭圆转子型罗茨型真空泵在气体流动分子状态下的反流研究
设计、研制并制造了一种转子为椭圆型的罗茨型双转子真空泵。在不同的转子旋转角度和压力下,对其通道电导率进行了实验测量。在流动分子状态下测定了通道的实验电导率。利用COMSOL Multiphysics软件包中实现的角度因子法,获得了双转子真空泵通道电导率的计算值。计算数据与实验数据偏差不超过10%。通过对非接触式泵槽通道电导率解析表达式的验证和验证,证明了将其应用于双转子真空泵工作过程数学模型的可能性。
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