{"title":"A Design Method for $\\Delta\\sum$ Force-Feedback Accelerometer Interface Systems","authors":"Mina Gad, A. Elshennawy, A. Ismail","doi":"10.1109/newcas49341.2020.9159794","DOIUrl":null,"url":null,"abstract":"Delta-Sigma $(\\Delta\\Sigma)$ technique represents an optimum way for realizing force-feedback electromechanical systems, especially for capacitive sensors. However, when operating the sensor in feedback, the stability of the system becomes a concern, particularly, in $\\Delta\\Sigma$ -based systems, and the higher the order of the system, the harder it becomes to achieve stability. Hence, following a systematic design flow for these systems is essential. While the design of stable electrical $\\Delta\\Sigma$ loops is well established, the design of electromechanical $\\Delta\\Sigma$ loops presents a challenge due to the nature of the capacitive sensor resonator. In this work, a way to stabilize high-order $\\Delta\\Sigma$-based interface systems for inertial capacitive sensors is introduced and a systematic design approach is proposed. The design approach is based on noise transfer function (NTF) matching which translates the system design problem to an NTF design problem as in electrical $\\Delta\\Sigma$ loops. The design approach is applied to the design of a fifth-order $\\Delta\\Sigma$ based interface for a capacitive accelerometer. The sensor has a $0.12 \\ \\mu \\mathrm{g}$ proof-mass, a resonance frequency of 1.8 kHz, a displacement-to-capacitance factor of $3.22 \\ \\text{pF}/ \\mu \\mathrm{m}$ and a feedback factor of $0.7 \\ \\mu \\mathrm{N/V}^{2}$. The designed system achieves a signal-to-quantization noise ratio (SQNR) of 181 dB.","PeriodicalId":135163,"journal":{"name":"2020 18th IEEE International New Circuits and Systems Conference (NEWCAS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2020-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 18th IEEE International New Circuits and Systems Conference (NEWCAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/newcas49341.2020.9159794","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Delta-Sigma $(\Delta\Sigma)$ technique represents an optimum way for realizing force-feedback electromechanical systems, especially for capacitive sensors. However, when operating the sensor in feedback, the stability of the system becomes a concern, particularly, in $\Delta\Sigma$ -based systems, and the higher the order of the system, the harder it becomes to achieve stability. Hence, following a systematic design flow for these systems is essential. While the design of stable electrical $\Delta\Sigma$ loops is well established, the design of electromechanical $\Delta\Sigma$ loops presents a challenge due to the nature of the capacitive sensor resonator. In this work, a way to stabilize high-order $\Delta\Sigma$-based interface systems for inertial capacitive sensors is introduced and a systematic design approach is proposed. The design approach is based on noise transfer function (NTF) matching which translates the system design problem to an NTF design problem as in electrical $\Delta\Sigma$ loops. The design approach is applied to the design of a fifth-order $\Delta\Sigma$ based interface for a capacitive accelerometer. The sensor has a $0.12 \ \mu \mathrm{g}$ proof-mass, a resonance frequency of 1.8 kHz, a displacement-to-capacitance factor of $3.22 \ \text{pF}/ \mu \mathrm{m}$ and a feedback factor of $0.7 \ \mu \mathrm{N/V}^{2}$. The designed system achieves a signal-to-quantization noise ratio (SQNR) of 181 dB.