Z. Fang, Z. Zhao, Yuehua Wu, Bojun Zhang, Yizhong Wang
{"title":"Integrated temperature and humidity sensor based MEMS","authors":"Z. Fang, Z. Zhao, Yuehua Wu, Bojun Zhang, Yizhong Wang","doi":"10.1109/ICIA.2004.1373325","DOIUrl":null,"url":null,"abstract":"MEMS-based integrated temperature and humidity sensor has the advantages of low weight, small size, low cost, easy integrity and is a highly advanced apparatus of identity, reliability, easy production. The feasibility of thermal conductivity method used to measure humidity and structure of the integrated temperature and humidity sensor are analyzed in this paper, and provides the measuring methods in detail. We mainly focus on measuring result of the humidity part, and verify the excellent performance of the integrated temperature and humidity sensor.","PeriodicalId":297178,"journal":{"name":"International Conference on Information Acquisition, 2004. Proceedings.","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"15","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Information Acquisition, 2004. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIA.2004.1373325","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 15
Abstract
MEMS-based integrated temperature and humidity sensor has the advantages of low weight, small size, low cost, easy integrity and is a highly advanced apparatus of identity, reliability, easy production. The feasibility of thermal conductivity method used to measure humidity and structure of the integrated temperature and humidity sensor are analyzed in this paper, and provides the measuring methods in detail. We mainly focus on measuring result of the humidity part, and verify the excellent performance of the integrated temperature and humidity sensor.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
