{"title":"Forming carbon films on cemented carbide surface using RF PCVD method","authors":"J. Grabarczyk, P. Niedzielski, P. Louda","doi":"10.1109/WBL.2001.946562","DOIUrl":null,"url":null,"abstract":"The aim of the project described in this paper was to examine the influence parameters of deposition and the method of location of samples on an RF-power electrode in the RF-PCVD method on the structure of carbon coatings, which covered cemented carbide substrates. This researches precedes an investigation concerning the covering of cemented carbide cutting tools by wear resistant carbon films, with were used in wood industry for milling of wood-base materials. As an object of investigation cutter head plates made of cemented carbide were used. Their size was about 30/spl times/12/spl times/1.5. In the deposition processes two types of parameters were applied: so-called \"hard\" parameters, when the bias voltage was higher then 500V, and \"soft\" parameters, when the bias voltage was less then 400V. In addition the flow of methane, pressure, and time of deposition were changed. In order to properly locate the cutting edge on the electrode three types of holders were used. Every process of depositing the carbon film on a cemented carbide substrate was preceded by one hour of ion etching.","PeriodicalId":315832,"journal":{"name":"3rd International Conference 'Novel Applications of Wide Bandgap Layers' Abstract Book (Cat. No.01EX500)","volume":"87 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"3rd International Conference 'Novel Applications of Wide Bandgap Layers' Abstract Book (Cat. No.01EX500)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WBL.2001.946562","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The aim of the project described in this paper was to examine the influence parameters of deposition and the method of location of samples on an RF-power electrode in the RF-PCVD method on the structure of carbon coatings, which covered cemented carbide substrates. This researches precedes an investigation concerning the covering of cemented carbide cutting tools by wear resistant carbon films, with were used in wood industry for milling of wood-base materials. As an object of investigation cutter head plates made of cemented carbide were used. Their size was about 30/spl times/12/spl times/1.5. In the deposition processes two types of parameters were applied: so-called "hard" parameters, when the bias voltage was higher then 500V, and "soft" parameters, when the bias voltage was less then 400V. In addition the flow of methane, pressure, and time of deposition were changed. In order to properly locate the cutting edge on the electrode three types of holders were used. Every process of depositing the carbon film on a cemented carbide substrate was preceded by one hour of ion etching.