J. Zapien, R. Collins, L. J. Pillone, H. Qi, R. Messier
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引用次数: 0
Abstract
We report the application of the UV-extended multichannel ellipsometer in studies of the growth and layered structure of cBN films deposited on c-Si using pulsed dc sputtering of a B/sub 4/C target with rf substrate bias.
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