Two-dimensional MEMS Scanning Mirror Driving Circuit with Auto Frequency Scan Function

Tong Zhou, Lei Ding, Han Liu, Yun Xu, B. Jiang, Yan Su
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Abstract

This paper proposes a two-dimensional (2-D) scanning micromirror drive circuit with auto frequency scan function, which solves the problem of complication of manual calibration for the scanning mirror. It can realize the automatic frequency calibration and high-precision control for the two-dimensional scanning micro mirror, which is characterized by high scanning range and high intelligence. Proposed drive circuit has been validated by the experiment results, and the horizontal and vertical swing angles are greater than ±23.6 and ±5.7 degrees respectively when voltage is 5V, which achieves high-resolution position sensing and wide-angle horizontal scanning.
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具有自动扫频功能的二维MEMS扫描镜驱动电路
提出了一种具有自动扫频功能的二维扫描微镜驱动电路,解决了扫描镜手动校准复杂的问题。可实现二维扫描微镜的自动频率定标和高精度控制,具有扫描范围大、智能化程度高的特点。实验结果验证了所提出的驱动电路,在电压为5V时,水平摆角大于±23.6度,垂直摆角大于±5.7度,实现了高分辨率的位置传感和广角水平扫描。
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