{"title":"Mathematical model and heat conduction analysis of a silicon-based thermoelectric enzyme sensor","authors":"Dong Yiqun, Z. Wuming, Li Jiliang, Chen Yuquan","doi":"10.1109/TENCON.1995.496416","DOIUrl":null,"url":null,"abstract":"The finite element method (FEM) employed to model the temperature field in a heated silicon plane was discussed, since optimum designing of the micro-silicon structure would be the basis of a micro-machined silicon-based thermal biosensor. In this research, the heat flow originally generated by the enzymatic reaction was conducted in the anisotropically etched silicon and collected by a thermopile array. Fourier's law and Laplace's equation were utilized to build the temperature field equations under appropriate boundary conditions in two-dimensions Cartesian coordinates, while FEM was used to calculate the temperature field and model conduction. Meanwhile, several available results for optimum design are reported.","PeriodicalId":425138,"journal":{"name":"1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings","volume":"93 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TENCON.1995.496416","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
The finite element method (FEM) employed to model the temperature field in a heated silicon plane was discussed, since optimum designing of the micro-silicon structure would be the basis of a micro-machined silicon-based thermal biosensor. In this research, the heat flow originally generated by the enzymatic reaction was conducted in the anisotropically etched silicon and collected by a thermopile array. Fourier's law and Laplace's equation were utilized to build the temperature field equations under appropriate boundary conditions in two-dimensions Cartesian coordinates, while FEM was used to calculate the temperature field and model conduction. Meanwhile, several available results for optimum design are reported.
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