{"title":"A Novel Terahertz Waveguide Filter Based on MEMS Technology","authors":"G. Shan, N. Zhang, Z. Yan, C. Shek","doi":"10.1109/IEEE-IWS.2019.8803867","DOIUrl":null,"url":null,"abstract":"This paper presents high performance 0.34THz waveguide filters based on MEMS technology. The relationship between fabrication error and filter performance was studied and a quantitative model is given. The fabrication geometrical tolerance can be controlled to be lower than 5% for iris structures (and ±5μm for resonant cavities). Our test results show a good agreement with simulation results when fabrication error is less than ~5 µm, the test result shows a performance of ~0.5dB insertion with ~5.29% relative bandwidth.","PeriodicalId":306297,"journal":{"name":"2019 IEEE MTT-S International Wireless Symposium (IWS)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE MTT-S International Wireless Symposium (IWS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEEE-IWS.2019.8803867","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents high performance 0.34THz waveguide filters based on MEMS technology. The relationship between fabrication error and filter performance was studied and a quantitative model is given. The fabrication geometrical tolerance can be controlled to be lower than 5% for iris structures (and ±5μm for resonant cavities). Our test results show a good agreement with simulation results when fabrication error is less than ~5 µm, the test result shows a performance of ~0.5dB insertion with ~5.29% relative bandwidth.
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