K. Bria, M. Ait El Fqih, A. Afkir, L. Jadoual, A. Kaddouri
{"title":"Angular Distribution of Particles Sputtered from the Vanadium Target by 5 keV Kr Ions: Simulation Study","authors":"K. Bria, M. Ait El Fqih, A. Afkir, L. Jadoual, A. Kaddouri","doi":"10.1051/epjap/2022220201","DOIUrl":null,"url":null,"abstract":"The sputtering of vanadium particles at normal incidence wassimulated. The SRIM-code combined to a new ANGULAIR and SDTrimSPsimulation was employed to obtain the sputtering yields and the angular distribution of the atoms. The simulation was made for a large number of incident Kr+ions with 5 keV energy, letting the computer count the number of emitted particles in the solid angle. The angular distribution of differential sputtering yields of vanadium shows an over-cosine tendency.","PeriodicalId":301303,"journal":{"name":"The European Physical Journal Applied Physics","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-08-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The European Physical Journal Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/epjap/2022220201","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The sputtering of vanadium particles at normal incidence wassimulated. The SRIM-code combined to a new ANGULAIR and SDTrimSPsimulation was employed to obtain the sputtering yields and the angular distribution of the atoms. The simulation was made for a large number of incident Kr+ions with 5 keV energy, letting the computer count the number of emitted particles in the solid angle. The angular distribution of differential sputtering yields of vanadium shows an over-cosine tendency.
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