Microbeam dynamic shaping by closed-loop electrostatic actuation using modal control

C. Kharrat, É. Colinet, A. Voda
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引用次数: 3

Abstract

A closed-loop control approach for the dynamic shaping of a microbeam by electrostatic actuation is described. Starting from a desired displacements reference vector of N small segments of the beam (representing the approximation of the continuous case), n controllers (n is the number of considered modes) output the stresses that must be distributed throughout the beam, on the N actuators. Because this reference may vary with time, the controllers are designed so that they accomplish good response dynamics, as well as performance and robustness specifications. The innovation in this method is that we control the dynamic coefficients associated to the modes of the microbeam and not directly the physical displacements in each small segment, which reduces the number of correctors from N to the number of n modes to control.
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采用模态控制的闭环静电驱动微光束动态整形
介绍了一种静电驱动微光束动态成形的闭环控制方法。从梁的N个小段的期望位移参考向量(表示连续情况的近似值)开始,N个控制器(N是考虑的模式数)在N个执行器上输出必须分布在整个梁上的应力。由于该参考值可能随时间变化,因此控制器的设计使它们能够实现良好的响应动力学,以及性能和鲁棒性规范。该方法的创新之处在于,我们控制了与微梁模态相关的动力系数,而不是直接控制每个小段的物理位移,这将校正器的数量从N个减少到要控制的N个模态。
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