Reversible nano-lithography for commercial approaches

Jae Hyun Kim, C. Ahn
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Abstract

The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro- or nano-scale sensors and actuators.
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用于商业方法的可逆纳米光刻
本研究提出的方法为制造由软聚合物、硬聚合物、金属以及硅等各种材料组成的纳米结构提供了巨大的可能性。这种纳米结构需要广泛的光学和显示器件、光子元件、物理器件、能源器件(包括二次电池、燃料电池、太阳能电池和能量采集器的电极)、生物器件(包括生物芯片、仿生或生物类似结构器件)和机械器件(包括微或纳米级传感器和执行器)。
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