"Fabrication Process Development of Uniform Nanopatterns on Lens Surface Via the Control of Focus Distance in Laser Interference Lithography"

Abstract

on Lens Surface Via the Control of Focus Distance Interference Lithography. Abstract In recent years, the demand for optics has been increasing as research is conducted in optically diverse fields. Typical optics have flat shaped optics, such as mirrors, but some have curvature, such as lens. Flat optics make it easy to uniformly manufacture coatings or nanopatterns on surfaces, but it is difficult to uniformly manufacture coatings or nanopatterns on lens with curvature. Therefore, in this study, the curvature of the lens was measured and the spherical wave was created to match the curvature of the lens to produce a uniform pattern on the lens surface with curvature, creating a periodic nanopattern through laser interference lithography on the top of the lens. To check the uniformity of nanopatterns on the lens, several points were selected from the specimen to measure, compare and analyze the AFM and SEM image.