A design f-theta lens for bio-medical system

C. Wen, K. Yuan, P.T. Chou, C. Lee, J.W. Huang
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Abstract

According to the development of bio-technology, the requirements of metrology in biochip measuring become more precise and noncontact measurement like optical detector or ultra wave sensor is plenty used in this field. Laser scanning technology is used in examine biochip for its characteristic of noncontact measurement, high performance and good sensitivities. This paper emphasis on the lens designed for micro meter focusing scanning for bio-medical systems. The scanner exploits the functional advantages and the optical system has small spot size, great linearity and large depth of focus. The optical design of the scanning lenses is discussed and the scanner fabrication is introduced.
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生物医学系统f-theta透镜的设计
随着生物技术的发展,计量学对生物芯片测量的要求越来越高,光学探测器或超声波传感器等非接触式测量在这一领域得到了广泛的应用。激光扫描技术以其非接触式测量、性能好、灵敏度高的特点被广泛应用于生物芯片检测中。本文重点介绍了用于生物医学系统微米聚焦扫描的透镜设计。该扫描仪充分利用了功能优势,光学系统光斑尺寸小、线性度好、聚焦深度大。讨论了扫描透镜的光学设计,介绍了扫描仪的制作方法。
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