Jian Zhou, D. Xiao, Z. X. Song, Ming Zhuo, Xuezhong Wu
{"title":"Transparent graphene-AZO/ZNO/glass surface acoustic wave device for electronics and lab-on-a-chip applications","authors":"Jian Zhou, D. Xiao, Z. X. Song, Ming Zhuo, Xuezhong Wu","doi":"10.1109/MEMSYS.2018.8346487","DOIUrl":null,"url":null,"abstract":"This paper reports the fabrication of transparent surface acoustic wave (SAW) resonators using novel graphene-AZO composite structure as the transparent electrodes. Transparent SAW resonators exhibited resonant frequency of 88.2 MHz at wavelength of 32 μm. and signal amplitudes up to 18 dB were obtained with the transparency above 80%. Temperature sensing showed the transparent SAW device had a positive temperature coefficient of frequency of ∼24.6 ppm/K. Humidity sensing was also conducted, demonstrating its application in humidity environment. Moreover, particle concentration using the transparent SAW devices have been achieved, demonstrating the great potential for applications in transparent electronics and MEMS.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"28 6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2018.8346487","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper reports the fabrication of transparent surface acoustic wave (SAW) resonators using novel graphene-AZO composite structure as the transparent electrodes. Transparent SAW resonators exhibited resonant frequency of 88.2 MHz at wavelength of 32 μm. and signal amplitudes up to 18 dB were obtained with the transparency above 80%. Temperature sensing showed the transparent SAW device had a positive temperature coefficient of frequency of ∼24.6 ppm/K. Humidity sensing was also conducted, demonstrating its application in humidity environment. Moreover, particle concentration using the transparent SAW devices have been achieved, demonstrating the great potential for applications in transparent electronics and MEMS.
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