{"title":"Pulsed multilevel current drive circuitry with LDMOS for monolithic deformable mirror","authors":"Tuo Wu, Hongyi Chen, Dahong Qian","doi":"10.1109/ICASIC.2005.1611395","DOIUrl":null,"url":null,"abstract":"The electrostatic capacitive microactuator has a critical minimum gap due to potential pull-in and tip-in phenomena. Since constant charge drive permits more stable operation range than constant voltage drive, current drive based on charge drive is attractive owing to its good controllability. Due to quasistatic precondition, a method of pulsed multilevel current drive is adopted to boost the refreshing frequency and charge level. An 80 times 80-actuator array with a refreshing frequency of 10 kHz and an 8-bit charge level is realized with this method","PeriodicalId":431034,"journal":{"name":"2005 6th International Conference on ASIC","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-10-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 6th International Conference on ASIC","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICASIC.2005.1611395","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The electrostatic capacitive microactuator has a critical minimum gap due to potential pull-in and tip-in phenomena. Since constant charge drive permits more stable operation range than constant voltage drive, current drive based on charge drive is attractive owing to its good controllability. Due to quasistatic precondition, a method of pulsed multilevel current drive is adopted to boost the refreshing frequency and charge level. An 80 times 80-actuator array with a refreshing frequency of 10 kHz and an 8-bit charge level is realized with this method
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