{"title":"Thin-film NTC resistor based on SrNb/sub x/Ti/sub 1-x/O/sub 3/","authors":"P. Lai, Bin Li, G.Q. Li","doi":"10.1109/HKEDM.1999.836412","DOIUrl":null,"url":null,"abstract":"A novel strontium titanate-niobate (SrNb/sub x/Ti/sub 1-x/O/sub 3/) thin-film NTC (negative temperature coefficient) resistor is fabricated on a SiO/sub 2//Si substrate by rf sputtering technique. The resistance-temperature characteristics reveal that SrNb/sub x/Ti/sub 1-x/O/sub 3/ thin-film resistor has a high sensitivity within 30/spl deg/C/spl sim/400/spl deg/C. Specifically, there is a turning point at 320/spl deg/C, above which the resistance sharply decreases due to ionic conduction. The a.c characteristics are also investigated.","PeriodicalId":342844,"journal":{"name":"Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HKEDM.1999.836412","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A novel strontium titanate-niobate (SrNb/sub x/Ti/sub 1-x/O/sub 3/) thin-film NTC (negative temperature coefficient) resistor is fabricated on a SiO/sub 2//Si substrate by rf sputtering technique. The resistance-temperature characteristics reveal that SrNb/sub x/Ti/sub 1-x/O/sub 3/ thin-film resistor has a high sensitivity within 30/spl deg/C/spl sim/400/spl deg/C. Specifically, there is a turning point at 320/spl deg/C, above which the resistance sharply decreases due to ionic conduction. The a.c characteristics are also investigated.
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