A Hybrid Integration Platform of Silicon Photonics

Chien-Chung Lin, Chien-Ying Huang, Kai-Ning Ku, K. Chou, T. Chen, Po-Chih Chang, Yu-Fang Chen, Chen-Yu Lin, Chung-Chih Wang, Chi-Sen Lee, Chih-Hsiang Hsu, Shang-Chun Chen
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Abstract

In this paper, we demonstrated the hybrid silicon photonics platform developed in ITRI. The functions of this platform include full-wafer high speed photonic measurement, active and passive device fabrication, and the photonic packaging technology.
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硅光子学混合集成平台
在本文中,我们展示了中国工研院开发的混合硅光子平台。该平台的功能包括全晶圆高速光子测量、有源和无源器件制造以及光子封装技术。
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