Dual AFM probe for imaging and in-situ mechanical operation

Abstract

This paper reviews the progress of nano-machined dual AFM probes which have functions of molecular imaging and in-situ mechanical operation. Fabrication techniques based on self-align Si etching process provided twin AFM tips with narrow gap, which minimize the offset calibration while switching from one probe to another. Dual cantilevers with thermal and magneto-strictive thin film actuators have also been developed for individual vertical deflection control for switching the two probes. Since demands to mechanical measurements and operations have been increased in biological applications, we anticipate these new techniques to contribute in fundamental biology studies in molecular level.