Juncheol Bae, Ju-Seob Jeon, Hwan Kim, Juyoung Yun, Yangjin Kim
{"title":"Development of Gaussian window for the surface profiling of silicon wafer in wavelength-scanning Fizeau interferometer","authors":"Juncheol Bae, Ju-Seob Jeon, Hwan Kim, Juyoung Yun, Yangjin Kim","doi":"10.1117/12.2673498","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":347203,"journal":{"name":"Optical Measurement Systems for Industrial Inspection XIII","volume":"70 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-08-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Measurement Systems for Industrial Inspection XIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2673498","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}