Integration challenges for high-performance carbon nanotube logic

J. Hannon, Hongsik Park, G. Tulevski, W. Haensch
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Abstract

As the scaling of silicon-based devices becomes more challenging, alternative channel materials are being actively explored. One approach is to replace the silicon channel with nanoparticles - for example, carbon nanotubes - that offer higher performance and better scaling potential. However, the incorporation of nanoparticles requires the development of new “bottom up” fabrication techniques to grow or place particles at precise locations on a substrate. The inherent randomness of these assembly processes has an obvious impact on device yield, which must be taken into account in optimizing the layout of a device. Here we describe a simple statistical analysis of device yield that can give insight into the self-assembly process, and is particularly useful for characterizing nanoparticle self-assembly from solution.
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高性能碳纳米管逻辑的集成挑战
随着硅基器件的缩放变得越来越具有挑战性,人们正在积极探索替代通道材料。一种方法是用纳米颗粒代替硅通道——例如,碳纳米管——提供更高的性能和更好的缩放潜力。然而,纳米颗粒的结合需要发展新的“自下而上”的制造技术,以在基板上的精确位置生长或放置颗粒。这些装配过程固有的随机性对器件成品率有明显的影响,在优化器件布局时必须考虑到这一点。在这里,我们描述了一个简单的器件产率统计分析,可以深入了解自组装过程,并对表征纳米颗粒从溶液的自组装特别有用。
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