Electrical modeling of MEMS sensor for integrated accelerometer applications

Abstract

A new electrical modeling method for mechanical capacitive sensor is proposed. The method is more direct and accurate in defining the mechanical sensor used for integrated accelerometer application as compared to the conventional ones. Both the open-loop and the force-balanced (closed-loop) cases have been considered. In addition, the model encompasses essential parameters to ensure it to mirror a realistic MEMS (microelectromechanical system) sensor. The derivation of the sensor model and application to the integrated accelerometer sensing circuit will be discussed. The simulation results will show the real-world effects of the parameters considered.