Design Methodology and Model Order Reduction for Resonant Accelerometers

Abstract

We report on a simple approach allowing systematic construction of compact reduced order models (ROMs) of resonant accelerometers based on the results of few finite element (FE) runs. The ROM accounts for the coupling between the vibrating sensing beams and can be used for the response analysis in frequency and time domains, under open and closed-loop operation. The implementation is first illustrated using an example of a generic accelerometer incorporating two sensing double-ended tuning forks (DETF). Then, a ROM of a realistic device with four proof masses and parallel linkage amplification mechanism is built. The model predictions are consistent with the FE results and the experimental data.