Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787740
H. Boiron, J. Pillon, E. Peter, E. Marin, M. Collignon, A. Morana, S. Girard, H. Lefèvre
We used Rayleigh-Optical Frequency Domain Reflectometry (Rayleigh-OFDR or R-OFDR) technique to improve our understanding of the longitudinal strain distribution along the optical fiber of a quadrupolar sensing coil of a fiber-optic gyroscope (FOG). To characterize this strain distribution remains crucial to better control the thermal impact on bias performance of the gyroscope. We analyzed this effect for a 400 m-long fiber coil, exposed to a ramp of temperature between 0°C and 80°C. R-OFDR method appears as a very promising candidate to reveal the complex thermo-mechanical behavior of the fiber sensing coil, offering a distributed view of classically integrated quantities, such as proper frequency or scale factor, and an access to the longitudinal elastic strain of the fiber, that is a source of bias defects in FOG measurement.
{"title":"Rayleigh-OFDR Strain Distribution Measurement of a Self-Standing Fiber-Gyroscope Coil","authors":"H. Boiron, J. Pillon, E. Peter, E. Marin, M. Collignon, A. Morana, S. Girard, H. Lefèvre","doi":"10.1109/INERTIAL53425.2022.9787740","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787740","url":null,"abstract":"We used Rayleigh-Optical Frequency Domain Reflectometry (Rayleigh-OFDR or R-OFDR) technique to improve our understanding of the longitudinal strain distribution along the optical fiber of a quadrupolar sensing coil of a fiber-optic gyroscope (FOG). To characterize this strain distribution remains crucial to better control the thermal impact on bias performance of the gyroscope. We analyzed this effect for a 400 m-long fiber coil, exposed to a ramp of temperature between 0°C and 80°C. R-OFDR method appears as a very promising candidate to reveal the complex thermo-mechanical behavior of the fiber sensing coil, offering a distributed view of classically integrated quantities, such as proper frequency or scale factor, and an access to the longitudinal elastic strain of the fiber, that is a source of bias defects in FOG measurement.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121236599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787528
Olivier Jolly, T. Kerrien, Steven Fosset, P. Cheiney, S. Michel, A. Cadu
This paper demonstrates that modified navigation grade accelerometers are good candidates for space applications. This is the response to an increasing demand for high performance inertial sensors in new space applications. Improvement of this product is an ongoing effort to make small sensors reliable in even more demanding applications, such as Pioneers [1] and Eurisa [2] European projects.
{"title":"Miniaturized Navigation Grade Quartz Vba Accelerometer For Space Applications","authors":"Olivier Jolly, T. Kerrien, Steven Fosset, P. Cheiney, S. Michel, A. Cadu","doi":"10.1109/INERTIAL53425.2022.9787528","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787528","url":null,"abstract":"This paper demonstrates that modified navigation grade accelerometers are good candidates for space applications. This is the response to an increasing demand for high performance inertial sensors in new space applications. Improvement of this product is an ongoing effort to make small sensors reliable in even more demanding applications, such as Pioneers [1] and Eurisa [2] European projects.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115018319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787718
Wei Guan, Danmeng Wang, M. Asadian, Yusheng Wang, A. Shkel
This paper studies the energy loss mechanism through the substrate in 3D Fused Silica dual-shell gyroscopes (DSGs), focusing on design and geometry of anchor structures. In dual-shell gyroscopes, the sensing shell element (inner shell) is anchored to a substrate through an inner stem and an outer cap shell. This configuration creates a double-end clamped anchor to enhance the robustness of the device under mechanical shock and vibrations. However, the double-ended anchor, if not optimized by design, can become a major contributor to the energy loss and adversely affect the sensor’s performance. In our analysis, we studied the effect of different anchor geometries on the anchor loss in the n=2 wineglass mode, using FEA and the Perfectly Matched Layer model. We identified the inner-to-outer shell junction as one of the key geometric characteristics in defining anchor losses in DSGs. Based on our parametric study, we confirmed the significance of location of junctions connecting the two shells on energy losses, identified a trend for optimization of geometry, and confirmed our findings experimentally.
{"title":"Effect of Geometry on Energy Losses In Fused Silica Dual-Shell Gyroscopes","authors":"Wei Guan, Danmeng Wang, M. Asadian, Yusheng Wang, A. Shkel","doi":"10.1109/INERTIAL53425.2022.9787718","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787718","url":null,"abstract":"This paper studies the energy loss mechanism through the substrate in 3D Fused Silica dual-shell gyroscopes (DSGs), focusing on design and geometry of anchor structures. In dual-shell gyroscopes, the sensing shell element (inner shell) is anchored to a substrate through an inner stem and an outer cap shell. This configuration creates a double-end clamped anchor to enhance the robustness of the device under mechanical shock and vibrations. However, the double-ended anchor, if not optimized by design, can become a major contributor to the energy loss and adversely affect the sensor’s performance. In our analysis, we studied the effect of different anchor geometries on the anchor loss in the n=2 wineglass mode, using FEA and the Perfectly Matched Layer model. We identified the inner-to-outer shell junction as one of the key geometric characteristics in defining anchor losses in DSGs. Based on our parametric study, we confirmed the significance of location of junctions connecting the two shells on energy losses, identified a trend for optimization of geometry, and confirmed our findings experimentally.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121980386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787731
Jean-Daniel Émerard, Julien Auger, J. Mace, C. Kergueris, Frédéric Fretouly, Y. Lenoir, F. Delhaye
Prolonging the pioneering works initiated in the 60’s [1], [2] and bringing radical innovations such as planar electrodes, Safran Electronics & Defense has successfully achieved a major technological breakthrough by developing and industrializing a navigation-grade Inertial Navigation System (INS) technology based on HRG Crystal™. Further optimization of the Cost Size Weight And Power (CSWAP) implies the development of a navigation grade MEMS gyroscope. Safran decided to take up the challenge. In this paper, we introduce a design evolution which has brought great performance results. While keeping an axisymmetric design and a fully balanced gyro mode [3], the innovation relies on electrostatic transducers now located between the vibrating masses. In the first part of this paper, we describe the key design rules and the innovation brought on electrostatic transducers location. The second part deals with the technological implementation of this new design on a silicon MEMS die. Finally, test results are presented with a special focus on performances under external vibrations.
{"title":"Si-MEMS gyro by Safran: Towards the navigation grade","authors":"Jean-Daniel Émerard, Julien Auger, J. Mace, C. Kergueris, Frédéric Fretouly, Y. Lenoir, F. Delhaye","doi":"10.1109/INERTIAL53425.2022.9787731","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787731","url":null,"abstract":"Prolonging the pioneering works initiated in the 60’s [1], [2] and bringing radical innovations such as planar electrodes, Safran Electronics & Defense has successfully achieved a major technological breakthrough by developing and industrializing a navigation-grade Inertial Navigation System (INS) technology based on HRG Crystal™. Further optimization of the Cost Size Weight And Power (CSWAP) implies the development of a navigation grade MEMS gyroscope. Safran decided to take up the challenge. In this paper, we introduce a design evolution which has brought great performance results. While keeping an axisymmetric design and a fully balanced gyro mode [3], the innovation relies on electrostatic transducers now located between the vibrating masses. In the first part of this paper, we describe the key design rules and the innovation brought on electrostatic transducers location. The second part deals with the technological implementation of this new design on a silicon MEMS die. Finally, test results are presented with a special focus on performances under external vibrations.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"122 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131161649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787757
Mehdi Bussutil, Bernard Vau, D. Ponceau, C. Pinzio
A novel method for the characterization of axis wobble in a turntable (motion simulator) is proposed. The procedure relies upon data provided by gyros of an inertial navigation unit mounted on the machine. By eliminating the effects due to gyros biases, Earth rotation and gyros misalignment it is possible to compute the wobble effect as a function of the angular position of the turntable axis. Experimental results are displayed. They show that this method can advantageously replace the classical wobble measurement based on the use of inclinometers.
{"title":"Wobble Estimation of a Turntable axis by using an Inertial Measurement Unit","authors":"Mehdi Bussutil, Bernard Vau, D. Ponceau, C. Pinzio","doi":"10.1109/INERTIAL53425.2022.9787757","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787757","url":null,"abstract":"A novel method for the characterization of axis wobble in a turntable (motion simulator) is proposed. The procedure relies upon data provided by gyros of an inertial navigation unit mounted on the machine. By eliminating the effects due to gyros biases, Earth rotation and gyros misalignment it is possible to compute the wobble effect as a function of the angular position of the turntable axis. Experimental results are displayed. They show that this method can advantageously replace the classical wobble measurement based on the use of inclinometers.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115526100","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787752
Xiang Dai, Vahid Nateghi, H. Fourati, C. Prieur
The attitude estimation of a rigid body by magnetic, angular rate, and gravity (MARG) sensors is a research subject for a large variety of engineering applications. A standard solution for building up the observer is usually based on the Kalman filter and its different extensions for versatility and practical implementation. However, the performance of these observers has long suffered from the inaccurate process and measurement noise covariance matrices, which in turn entails tedious parameter turning procedures. To overcome the laborious noise covariance matrices regulation, we propose in this paper a Q-learning-based approach to autonomously adapt the values of process and measurement noise covariance matrices. The Q-learning method establishes a reinforcement learning mechanism that forces the noise covariance matrices pair with the least difference between predictions and measurements of output to be found in a predetermined candidate set of noise covariance matrices. The effectiveness of the Q-learning approach, applied to Extended Kalman filter-based attitude estimation, is validated through the Monte Carlo method that uses real flight data on an unmanned aerial vehicle.
{"title":"Q-Learning-Based Noise Covariance Adaptation in Kalman Filter for MARG Sensors Attitude Estimation","authors":"Xiang Dai, Vahid Nateghi, H. Fourati, C. Prieur","doi":"10.1109/INERTIAL53425.2022.9787752","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787752","url":null,"abstract":"The attitude estimation of a rigid body by magnetic, angular rate, and gravity (MARG) sensors is a research subject for a large variety of engineering applications. A standard solution for building up the observer is usually based on the Kalman filter and its different extensions for versatility and practical implementation. However, the performance of these observers has long suffered from the inaccurate process and measurement noise covariance matrices, which in turn entails tedious parameter turning procedures. To overcome the laborious noise covariance matrices regulation, we propose in this paper a Q-learning-based approach to autonomously adapt the values of process and measurement noise covariance matrices. The Q-learning method establishes a reinforcement learning mechanism that forces the noise covariance matrices pair with the least difference between predictions and measurements of output to be found in a predetermined candidate set of noise covariance matrices. The effectiveness of the Q-learning approach, applied to Extended Kalman filter-based attitude estimation, is validated through the Monte Carlo method that uses real flight data on an unmanned aerial vehicle.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"24 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120843165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787526
T. Miani, T. Verdot, A. Berthelot, F. Maspero, A. Koumela, P. Robert, G. Langfelder, J. Arcamone, M. Sansa
Resonant-beam accelerometers based on nanoresonators have demonstrated that reducing the size of the sensing element allows overcoming the sensitivity-bandwidth trade-off [1]. Here we report on an improvement of the performance of such sensors, through an enhancement of the wafer-level packaging (WLP). We perform a study of the different noise sources present in the system, and we show that an improvement of the vacuum level allows overcoming the thermomechanical noise of the proof mass which – so far – limited the previous generation of sensors.
{"title":"Nanoresonator-based accelerometer with large bandwidth and improved bias stability","authors":"T. Miani, T. Verdot, A. Berthelot, F. Maspero, A. Koumela, P. Robert, G. Langfelder, J. Arcamone, M. Sansa","doi":"10.1109/INERTIAL53425.2022.9787526","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787526","url":null,"abstract":"Resonant-beam accelerometers based on nanoresonators have demonstrated that reducing the size of the sensing element allows overcoming the sensitivity-bandwidth trade-off [1]. Here we report on an improvement of the performance of such sensors, through an enhancement of the wafer-level packaging (WLP). We perform a study of the different noise sources present in the system, and we show that an improvement of the vacuum level allows overcoming the thermomechanical noise of the proof mass which – so far – limited the previous generation of sensors.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"160 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127419124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787521
J. Bernard, M. Cadoret, Y. Bidel, C. Salducci, N. Zahzam, Sylvain Schwartz, A. Bonnin, C. Blanchard, A. Bresson
In this paper we present our progress towards the development of a complete cold-atom Inertial Measurement Unit (IMU). Our goal is to have a single atomic sensor that will alternatively measure each inertial component (3 accelerations and 3 rotations). Every atomic measurement will be hybridized with a set of classical inertial sensors. Hybridization enables to combine the advantages of both technologies and to provide accurate continuous measurements with high dynamic range, in the scope of onboard inertial navigation compatibility.
{"title":"Progress towards the development of a cold-atom inertial measurement unit for onboard applications","authors":"J. Bernard, M. Cadoret, Y. Bidel, C. Salducci, N. Zahzam, Sylvain Schwartz, A. Bonnin, C. Blanchard, A. Bresson","doi":"10.1109/INERTIAL53425.2022.9787521","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787521","url":null,"abstract":"In this paper we present our progress towards the development of a complete cold-atom Inertial Measurement Unit (IMU). Our goal is to have a single atomic sensor that will alternatively measure each inertial component (3 accelerations and 3 rotations). Every atomic measurement will be hybridized with a set of classical inertial sensors. Hybridization enables to combine the advantages of both technologies and to provide accurate continuous measurements with high dynamic range, in the scope of onboard inertial navigation compatibility.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130940961","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787723
T. Tsukamoto, Shuji Tanaka
In this paper, a real-time quality factor (Q-factor) mismatch detection method for a degenerated resonator used in quadrature frequency modulated (QFM) and rate integrating gyroscopes (RIG) was proposed and experimentally demonstrated. The amplitudes of the oscillation which is usually not used in the conventional QFM/RIG were used for the Qfactor mismatch detection. A dynamic mismatch compensation technique was developed to eliminate the Q-factor mismatch even in the transient state. By combining these methods, the Qfactor mismatch was successfully detected. The proposed method can be used in the QFM/RIG during measurement, because the amplitude modulation does not disturb the frequency and phase of oscillations.
{"title":"Real Time Q-Factor Mismatch Detection For Rate Integrating Gyroscope Using Amplitude Modulated Driving Signal","authors":"T. Tsukamoto, Shuji Tanaka","doi":"10.1109/INERTIAL53425.2022.9787723","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787723","url":null,"abstract":"In this paper, a real-time quality factor (Q-factor) mismatch detection method for a degenerated resonator used in quadrature frequency modulated (QFM) and rate integrating gyroscopes (RIG) was proposed and experimentally demonstrated. The amplitudes of the oscillation which is usually not used in the conventional QFM/RIG were used for the Qfactor mismatch detection. A dynamic mismatch compensation technique was developed to eliminate the Q-factor mismatch even in the transient state. By combining these methods, the Qfactor mismatch was successfully detected. The proposed method can be used in the QFM/RIG during measurement, because the amplitude modulation does not disturb the frequency and phase of oscillations.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133986545","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2022-05-08DOI: 10.1109/INERTIAL53425.2022.9787524
Timothy Hodges, Lixue Wu, G. Mu, N. Snell, Alexandre Bouchard, Michel Stephan, Huang Huang, T. Koukoulas, Richard Green, R. St-Gelais
We report on the experimental characterization of a mass-loaded silicon nitride membrane-based resonator, which we investigate towards the development of accelerometers for small amplitude acceleration sensing at low frequencies. We experimentally demonstrate a ~1.1 ×10−6 kg proof mass system achieving a 17,950 mechanical quality factor for a 526 Hz natural resonance frequency, which compares favorably to other optically interrogated on-chip accelerometers [1]–[3]. The inferred acceleration noise floor of the device is currently limited by the displacement noise of the optical fiber displacement readout, yielding a noise amplitude spectral density of $1{{mu g/}}sqrt {{text{Hz}}} $ at 10 Hz.
{"title":"Characterization of Mass-Loaded Silicon Nitride On-Chip Resonators for Traceable Sensing of Low Amplitude Acceleration","authors":"Timothy Hodges, Lixue Wu, G. Mu, N. Snell, Alexandre Bouchard, Michel Stephan, Huang Huang, T. Koukoulas, Richard Green, R. St-Gelais","doi":"10.1109/INERTIAL53425.2022.9787524","DOIUrl":"https://doi.org/10.1109/INERTIAL53425.2022.9787524","url":null,"abstract":"We report on the experimental characterization of a mass-loaded silicon nitride membrane-based resonator, which we investigate towards the development of accelerometers for small amplitude acceleration sensing at low frequencies. We experimentally demonstrate a ~1.1 ×10−6 kg proof mass system achieving a 17,950 mechanical quality factor for a 526 Hz natural resonance frequency, which compares favorably to other optically interrogated on-chip accelerometers [1]–[3]. The inferred acceleration noise floor of the device is currently limited by the displacement noise of the optical fiber displacement readout, yielding a noise amplitude spectral density of $1{{mu g/}}sqrt {{text{Hz}}} $ at 10 Hz.","PeriodicalId":435781,"journal":{"name":"2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115592271","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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