Full-wafer loss measurements of silicon ridge waveguides

Michael N. Gould, Jing Li, T. Baehr‐Jones, M. Hochberg
{"title":"Full-wafer loss measurements of silicon ridge waveguides","authors":"Michael N. Gould, Jing Li, T. Baehr‐Jones, M. Hochberg","doi":"10.1109/GROUP4.2011.6053774","DOIUrl":null,"url":null,"abstract":"We present full-wafer loss data for ridge waveguides for three different geometries fabricated on 150 mm silicon-on-insulator wafers. Full-wafer testing was made possible by a vertically coupled, automated test system.","PeriodicalId":141233,"journal":{"name":"8th IEEE International Conference on Group IV Photonics","volume":"2020 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"8th IEEE International Conference on Group IV Photonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GROUP4.2011.6053774","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

Abstract

We present full-wafer loss data for ridge waveguides for three different geometries fabricated on 150 mm silicon-on-insulator wafers. Full-wafer testing was made possible by a vertically coupled, automated test system.
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硅脊波导的全晶圆损耗测量
我们提供了三种不同几何形状的脊波导在150毫米硅绝缘体上的全晶圆损耗数据。通过垂直耦合的自动化测试系统,全晶圆测试成为可能。
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