{"title":"Measuring the divergence of laser beams to correct interferometric displacement measurements","authors":"C. Sasso, C. Palmisano, E. Massa, G. Mana","doi":"10.1109/CPEM.2014.6898330","DOIUrl":null,"url":null,"abstract":"Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.","PeriodicalId":256575,"journal":{"name":"29th Conference on Precision Electromagnetic Measurements (CPEM 2014)","volume":"72 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"29th Conference on Precision Electromagnetic Measurements (CPEM 2014)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CPEM.2014.6898330","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.
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