Study on ultra-trace metal analysis in organic solvent by re-dissolved method and direct method

Hiromi Kimura, Noriko Tsujinaka, Toshimasa Katou
{"title":"Study on ultra-trace metal analysis in organic solvent by re-dissolved method and direct method","authors":"Hiromi Kimura, Noriko Tsujinaka, Toshimasa Katou","doi":"10.1109/ISSM51728.2020.9377501","DOIUrl":null,"url":null,"abstract":"In this paper, the ultra-trace metal quantification up to 1 ng/L in isopropyl alcohol (IPA) are discussed. In order to quantify the metal concentrations, “re-dissolved method” in which the solvent is completely evaporated and re-dissolved in acid for analysis with an inductively coupled plasma mass spectrometer (ICP-MS), and “direct method” in which the solvent is directly introduced into the ICP-MS are evaluated. In both methods, it was found that impurities derived from the instruments used in the analysis affect the measurement, and it was possible to reduce metal elution from the instruments by performing appropriate pre-cleaning. In addition, the analysis accuracy could be ensured. As a result, we were able to measure the metal contained in IPA the lower limit of quantification of 1 ng/L by each method. Furthermore, it was confirmed that there was no difference in the analytical values between the both methods. By properly using the two methods, we believe that it can be widely applied to the analysis of organic solvents other than IPA and the analysis of multiple samples of a single solvent.","PeriodicalId":270309,"journal":{"name":"2020 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM51728.2020.9377501","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

In this paper, the ultra-trace metal quantification up to 1 ng/L in isopropyl alcohol (IPA) are discussed. In order to quantify the metal concentrations, “re-dissolved method” in which the solvent is completely evaporated and re-dissolved in acid for analysis with an inductively coupled plasma mass spectrometer (ICP-MS), and “direct method” in which the solvent is directly introduced into the ICP-MS are evaluated. In both methods, it was found that impurities derived from the instruments used in the analysis affect the measurement, and it was possible to reduce metal elution from the instruments by performing appropriate pre-cleaning. In addition, the analysis accuracy could be ensured. As a result, we were able to measure the metal contained in IPA the lower limit of quantification of 1 ng/L by each method. Furthermore, it was confirmed that there was no difference in the analytical values between the both methods. By properly using the two methods, we believe that it can be widely applied to the analysis of organic solvents other than IPA and the analysis of multiple samples of a single solvent.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
再溶解法和直接法分析有机溶剂中超痕量金属的研究
本文讨论了异丙醇(IPA)中高达1ng /L的超痕量金属的定量。为了定量测定金属的浓度,对“再溶解法”和“直接法”进行了评价。“再溶解法”是指溶剂完全蒸发后再溶解在酸中,用电感耦合等离子体质谱仪(ICP-MS)进行分析,“直接法”是指溶剂直接引入ICP-MS。在这两种方法中,发现来自分析所用仪器的杂质会影响测量,并且可以通过进行适当的预清洗来减少仪器中的金属洗脱。此外,还可以保证分析的准确性。结果,我们能够测量IPA中所含的金属,每种方法的定量下限为1 ng/L。此外,还证实了两种方法的分析值没有差异。通过正确使用这两种方法,我们相信它可以广泛应用于IPA以外的有机溶剂的分析和单一溶剂的多个样品的分析。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Process Optimization of Trench Field Plate Power MOSFETs with Sequential Phosphorus-Doped Silicon Predicting and considering properties of general polymers using incomplete dataset Digital Transformation's Impact on Smart Manufacturing Etching characteristics of PECVD-prepared SiN films with CF4/D2 and CF4/H2 plasmas at different temperatures Using Quartz Crystal Microbalance to Provide Real-Time Process Monitoring
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1